JPH0123588Y2 - - Google Patents
Info
- Publication number
- JPH0123588Y2 JPH0123588Y2 JP4412684U JP4412684U JPH0123588Y2 JP H0123588 Y2 JPH0123588 Y2 JP H0123588Y2 JP 4412684 U JP4412684 U JP 4412684U JP 4412684 U JP4412684 U JP 4412684U JP H0123588 Y2 JPH0123588 Y2 JP H0123588Y2
- Authority
- JP
- Japan
- Prior art keywords
- storage tank
- carbon dioxide
- removal device
- water
- ultrapure water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 32
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 21
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 16
- 239000001569 carbon dioxide Substances 0.000 claims description 16
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 14
- 239000012498 ultrapure water Substances 0.000 claims description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 3
- 239000010436 fluorite Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Separation Of Gases By Adsorption (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4412684U JPS60155992U (ja) | 1984-03-29 | 1984-03-29 | 炭酸ガス除去装置を有する純水貯留タンク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4412684U JPS60155992U (ja) | 1984-03-29 | 1984-03-29 | 炭酸ガス除去装置を有する純水貯留タンク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60155992U JPS60155992U (ja) | 1985-10-17 |
| JPH0123588Y2 true JPH0123588Y2 (en]) | 1989-07-19 |
Family
ID=30556418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4412684U Granted JPS60155992U (ja) | 1984-03-29 | 1984-03-29 | 炭酸ガス除去装置を有する純水貯留タンク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60155992U (en]) |
-
1984
- 1984-03-29 JP JP4412684U patent/JPS60155992U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60155992U (ja) | 1985-10-17 |
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